Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.

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Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.

Silicon -- Congresses.

Semiconductors -- Congresses.

Gupta, D. C. (Dinesh C.)

ASTM Committee F-1 on Electronics.

United States. National Bureau of Standards.

Stanford University.

Symposium on Silicon Processing (1982 : San Jose, Calif.)