Chapman, Brian N.
Glow discharge processes : sputtering and plasma etching / Brian Chapman.
Sputtering (Physics)
Glow discharges.
Plasma etching.
Gasentladung. swd
Glimmentladung. swd
Zerstũbung. swd
Pulvřisation cathodique. ram
Dčharges luminescentes. ram
Gravure par plasma. ram