International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (55, Las Vegas, Nev.)
Papers from the 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication : May 31 - June 3, 2011, Las Vegas, NV / conference chair: Alan Brodie.
Microelectronics -- Congresses.
Nanotechnology -- Congresses.
Brodie, Alan.