Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles.
Plasma engineering -- Congresses.
Plasma etching -- Congresses.
Electronics -- Materials -- Congresses.
Chang, R. P. H. (Robert Pang Heng), 1941-
Abeles, B.
Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)