Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
Plasma engineering.
Semiconductors -- Etching.
Plasma etching.
Rossnagel, Stephen M.
Cuomo, J. J.
Westwood, William D. (William Dickson), 1937-