Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, Richard B. Fair, Charles W. Pearce, Jack Washburn.
Semiconductors -- Defects -- Congresses.
Diffusion -- Congresses.
Semiconductor doping -- Congresses.
Getters -- Congresses.
Fair, Richard B.
Pearce, Charles W.
Washburn, Jack, 1921-
Materials Research Society. Fall Meeting (1984 : Boston, Mass.)
Symposium on Impurity Diffusion and Gettering in Semiconductors (1984 : Boston, Mass.)