Plasma processing for VLSI / edited by Norman G. Einspruch, Dale M. Brown.
Integrated circuits -- Very large scale integration.
Plasma (Ionized gases) -- Industrial applications.
gravure.
lithographie.
Plasma.
circuit intǧr
semiconducteur.
VLSI.
Integrated circuits -- Very large scale integration. fast (OCoLC)fst00975602
Plasma (Ionized gases) -- Industrial applications. fast (OCoLC)fst01066270
Gravure par plasma. ram
Lithographie par rayons X. ram
Pulvřisation cathodique. ram
Circuits intǧrš ̉trs̈ grande čhelle. ram
Einspruch, Norman G.
Brown, Dale M.