Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J.P. Ballantyne ... [et al.].
Microelectronics.
Lithography, Electron beam.
Microľectronique.
Lithographie par faisceau d'ľectrons.
Elektronenstrahllithographie. swd
Mikroelektronik. swd
Lithography, Electron beam. fast (OCoLC)fst01000292
Microelectronics. fast (OCoLC)fst01019757
Brewer, George Raymond, 1922-
Ballantyne, J. P.