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Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 / editors, David G. Seiler ... [et al.].
Integrated circuits -- Ultra large scale integration -- Congresses.
Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
Seiler, David G.
International Conference on Characterization and Metrology for ULSI Technology (2000 : Gaithersburg, Md.)
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