Topical Conference on Deposition and Growth: Limits for Microelectronics (1987 : Anaheim, Calif.) Deposition and growth : limits for microelectronics, Anaheim, CA 1987 / editor, G.W. Rubloff.

Topical Conference on Deposition and Growth: Limits for Microelectronics (1987 : Anaheim, Calif.)

Deposition and growth : limits for microelectronics, Anaheim, CA 1987 / editor, G.W. Rubloff.

Microelectronics -- Congresses.

Thin films -- Congresses.

Rubloff, G. W. (Gary W.)

American Vacuum Society. Electronic Materials and Process Division.

American Vacuum Society. Thin Film Division

American Institute of Physics.

Limits for microelectronics.