Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998 / editors, David G. Seiler ... [et al.].
Integrated circuits -- Ultra large scale integration
Integrated circuits -- Ultra large scale integration
Seiler, David G.
International Conference on Characterization and Metrology for ULSI Technology (1998 : Gaithersburg, Md.)