Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 / editors, David G. Seiler ... [et al.].
Integrated circuits -- Ultra large scale integration -- Congresses.
Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
Seiler, David G.
International Conference on Characterization and Metrology for ULSI Technology (2003 : Austin, Tex.)